Chair for Experimental Physics II - Reactive Plasmas

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Current project A6 SFB 1316

Micro plasma arrays

Micro cavity plasma arrays comprise of thousands of geometrically identical microcavities, which can be produced up to dimensions of several dm2. Depending on the applied electrical field, polarity, and pressure the discharges extend out of the cavities. Thus, enclosing the array structure with a second dielectric at a small gap distance forms an in-plasma-catalyst reactor. These devices also allow to integrate dielectric, catalytic surfaces as the cavity bottom. Apart from direct gas reformation, plasma is also used to ‘clean’ and ’refresh’ occupied catalytic surface sites. The plasma parameters as well as the discharge distribution inside and above the cavities are strongly dependent on externally controllable parameters such as cavity dimension, pressure, and voltage.

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