Publications

2017

2016

2015

2014

2013

2012

  • Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma discharges
    A. Hecimovic, T. de los Arcos, V. Schulz-von der Gathen, M. Böke, and J. Winter
    Plasma Sources Sci. Technol. 21, (2012) 035017
  • Plasma self-organisation in High Power Impulse Magnetron Sputtering Discharges
    A.P. Ehiasarian, A. Hecimovic, J. Winter, T. de los Arcos, R. New, V. Schulz-von der Gathen, M. Böke
    IOP Conf. Series: Materials Science and Engineering 39 (2012) 012012
  • High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
    Ehiasarian, A. P.; Hecimovic, Ante; de los Arcos, T.; New, R.; Schulz-von der Gathen, Volker; Böke, Marc; Winter, J.
    Appl. Phys. Lett. 100, 114101 (2012)
  • Functional plasma polymers deposited in capacitivley and inductively couped plasmas
    D. Hegeman, E. Koerner, C. Shang, J. Benedikt, A. von Keudell
    Appl. Phys. Lett. 100, 051601 (2012)
  • Unexpected O and O3 production in the effluent of He/O2 microplasma jets emanating into ambient air
    D. Ellerweg, A. von Keudell and J. Benedikt
    Plasma Sources Science and Technol. 21, 034019 (2012)
  • The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
    Rüdiger Reuter, Katja Rügner, Dirk Ellerweg, Teresa de los Arcos, Achim von Keudell, Jan Benedikt
    Plasma Processes and Polymers (2012) DOI: 10.1002/ppap.201100146
  • Quadrupol Masspectrometry of Reactive Plasmas (review)
    J. Benedikt, D. Ellerweg, A. Hecimovic, A. von Keudell
    J. Phys. D 45, 403001 (2012)
  • Chemical and Physical Sputtering of PET
    S. Große-Kreul, C. Corbella, A. von Keudell
    Plasma Processes and Polymers DOI 10.1002/201200094 (2012)
  • Time resolved measurement of film growth during HPPMS of titanium: the rotating shutter concept
    F. Mitschker, M. Prenzel, J. Benedikt, A. von Keudell
    J. Phy. D Fast Track Communications 45, 4020001 (2012)
  • Application of a mode-locked fiber laser for highly time resolved broadband absorption spectroscopy and laser assisted breakdown on micro-plasmas
    B. Niermann, I.L. Budunoglu, K. Gurel, M. Böke, F.O. Ilday, and J. Winter
    J. Phys. D: Appl. Phys. 45, (2012) 245202
  • Atomic oxygen in a cold argon plasma Jet: TALIF spectroscopy in ambient air with modelling and measurements of ambient species diffusion
    S Reuter, J Winter, A Schmidt-Bleker, D Schroeder, H Lange, N Knake, V Schulz-v.d.Gathen, K-D Weltmann
    Plasma Sources Sci. Technol. 21 (2012) 024005
  • Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet
    D Schröder, H Bahre, N Knake, J Winter, T de los Arcos and V Schulz-von der Gathen
    Plasma Sources Sci. Technol. 21 (2012) 024007
  • Argon metastable dynamics in a filamentary jet micro-discharge at atmospheric pressure
    B. Niermann, R. Reuter, T. Kuschel, J. Benedikt, M. Böke, and J. Winte
    Plasma Sources Sci. Technol. 21 (2012),034002
  • Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films,
    M. Prenzel, A. Kortmann, T. de los Arcos, J. Winter, A. von Keudell,
    J. Appl. Phys 45, 103306 (2012)

2011

  • X-ray photoelectron spectroscpy on imlanted argon as a tool to follow local structral changes in thin films
    A. Rastgoo, T. de los Arcos, M. Prenzel, A. von Keudell, J. Winter
    Thin Solid Films 520, 1625 (2011)
  • Surface reactions as carbon removal mechanism in deposition of silicon dioxide films at atmospheric pressure
    R. Reuter, D. Ellerweg, A. von Keudell, J. Benedikt
    Appl. Phys. Lett. 98, 111502 (2011)
  • Impurity intrusion in radio-frequency micro-plasma jets operated in ambient air
    B. Niermann, A. Kanitz, M, Böke, and J. Winter
    J. Phys. D: Appl. Phys. 44, (2011) 325201
  • Oscillation modes of dc microdischarges with parallel-plate geometry
    Ilija Stefanovic, Thomas Kuschel, Nikola Zkoro, Dragana Maric, Zoran Lj Petrovic and Jörg Winter
    J. Appl. Phys. vol. 110, Issue 8, 083310
  • Spatial dynamics of helium metastables in sheath or bulk dominated rf micro-plasma jets
    B. Niermann, T. Hemke, N.Y. Babaeva, M. Böke, R.P. Brinkmann, M.J. Kushner, T. Mussenbrock, and J. Winter
    J. Phys. D: Appl. Phys. 44 (2011) 485204
  • Excitation dynamics of a kHz driven micro-structured plasma channel device operated in argon
    A Greb, H Boettner, J Winter and V Schulz-von der Gathen
    Plasma Sources Sci. Technol. 20 (2011) 055010
  • The role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jet
    S. Schneider, J.-W. Lackmann, D. Ellerweg, B. Denis, F. Narberhaus, J.E. Bandow, J. Benedikt
    Plasma Process. Polym. (2011) accepted
  • Separation of VUV/UV photons and reactive particles in the effluent of a He/O2 atmospheric
    S. Schneider, J.-W. Lackmann, F. Narberhaus, J. E. Bandow, B. Denis, J. Benedikt
    J. Phys. D: Appl. Phys. 44 (2011) 295201
  • Spatiotemporal profile of emission from oscillating dc microdischarges
    T. Kuschel, I. Stefanovic, N. Zkoro, D. Maric, G. Malovic, J. Winter, Z. Lj. Petrovic
    IEEE Trans. Plasma Sci., Spec. Issue on Images in Plasma Sci.
  • Axial light emission and Ar metastable densities in a parallel plate dc micro discharge in steady state and transient regimes
    T. Kuschel, B. Niermann, I. Stefanovic, M. Böke, N. Zkoro, D. Maric, Z. Lj. Petrovic, and J. Winter
    Plasma Sources Sci. Technol. 2011 20 065001
  • Vacuum Ultraviolet (VUV) Emission of an Atmospheric Pressure Plasma Jet (micro-APPJ) Operated in Helium-Oxygen Mixtures in Ambient Air
    H. Bahre, H.Lange, V. Schulz-von der Gathen, R. Foest
    Acta Technica, 56 (2011) T199

2010

  • A Physicist’s Perspective on “Views on Macroscopic Kinetics of Plasma Polymerisation”
    A. von Keudell, J. Benedikt
    Plasma Processes and Polymers 7, (2010)
  • Elimination of biological contaminations from surfaces by plasma discharges: the importance of chemical sputtering
    H. Rauscher, O. Kylian, J. Benedikt, A. von Keudell, F. Rossi
    Chem Phys. Chem. 11, 1382 (2010)
  • Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects
    T. Baloniak, R. Reuter, A. von Keudell
    J. Phys. D 43, 335201 (2010)
  • Calibration of a miniaturized retarding field analyzer for low-temperature plasmas: geometry and collisional effects
    T. Baloniak, R. Reuter, C. Flötgen, A. von Keudell
    J. Phys. D 43, 55203 (2010)
  • Ion-enhanced oxidation of aluminium as a fundamental surface process during target poisoning in reactive magnetron sputtering
    Thomas Kuschel and Achim von Keudell
    Journal of Applied Physics 107, 103302 (2010)
  • Inactivation of bacteria and biomolecules using low pressure plasma discharges (BIODECON review)
    A. von Keudell, P. Awakwowicz, J. Benedikt, V. Raballand, A. Yanguas-Gil, J. Opretzka, C. Flötgen, R. Reuter L. Byelykh, H. Halfmann, K. Stapelmann, B
    Plasma Processes and Polymers 7, 327 (2010)
  • Chaotic behavior of dc microdischarges with parallel-plate geometry
    Ilija Stefanovic, Nikola Zkoro, Dragana Maric and Zoran Lj. Petrovic
    20th ESCAMPIG, 13-17 July 2010, Novi Sad, Serbia P3.41
  • Space resolved density measurements of argon and helium metastable atoms in radio-frequency generated He-Ar micro-plasmas
    B. Niermann, M. Böke, N. Sadeghi and J. Winter
    Eur. Phys. J. D 60, (2010) 489-495
  • Gas flow dependence of ground state atomic oxygen in plasma needle discharge at atmospheric pressure
    Yukinori Sakiyama, Nikolas Knake, Daniel Schröder, Jörg Winter, Volker Schulz-von der Gathen, and David B. Graves
    Appl. Phys. Lett. 97 (2010) 151501
  • Phase resolved optical emission spectroscopy of coaxial microplasma jet operated with He and Ar
    J. Benedikt, S. Hofmann, N. Knake, H. Böttner, R. Reuter, A. von Keudell, and V. Schulz-von der Gathen
    Eur. Phys. J. D (2010) 60 539
  • Atomic oxygen formation in a radio-frequency driven micro-atmospheric pressure plasma jet
    J Waskoenig, K Niemi, N Knake, L M Graham, S Reuter, V Schulz-von der Gathen and T Gans
    Plasma Sources Sci. Technol. 19 (2010) 045018
  • Excitation dynamics of micro-structured atmospheric pressure plasma arrays
    H. Boettner, J. Waskoenig, T. L. Kim, P. A. Tchertchian, D. O'Connell, J. Winter, and V. Schulz-von der Gathen
    J. Phys. D: Appl. Phys. 43, (2010) 124010
  • Investigations of the spatio-temporal build-up of atomic oxygen inside the micro-scaled atmospheric pressure plasma jet
    N. Knake and V. Schulz-von der Gathen
    Eur. Phys. J. D 60, (2010) 645
  • Characterization of the effluent of a He/O2microscale atmospheric pressure plasma jet by quantitative molecular beam mass spectrometry
    D. Ellerweg, J. Benedikt and A von Keudell N. Knake and V. Schulz-von der Gathen
    New J. Physics 12, 013021 (2010)
  • Plasma enhanced chemical vapor deposition of wear resistant gradual a-Si1-x:Cx:H coatings on nickel-titanium for biomedical applications
    B. Niermann, M. Böke, J.-C. Schauer, and J. Winter
    J. Appl. Phys. 107, (2010) 053301
  • The challenge of revealing and tailoring the dynamics of radio-frequency plasmas
    T. Gans, D. O'Connell, V. Schulz- von der Gathen, and J. Waskoenig
    Plasma Sources Sci. Technol. 19, (2010) 034010
  • Investigations on the Generation of Atomic Oxygen Inside a Capacitively Coupled Atmospheric Pressure Plasma Jet
    N. Knake, D. Schröder, J. Winter and V. Schulz-von der Gathen
    J. Phys.: Conference Series 227 (2010) 012020
  • Diagnostic based modelling of radio-frequency driven atmospheric pressure plasmas
    K. Niemi, S. Reuter, L.M. Graham, J. Waskoenig, N. Knake, V. Schulz-von der Gathen, and T. Gans
    J. Phys. D: Applied Physics 43 (2010) 124006

2009

  • Optimised plasma absorption probe for the electron density determination in reactive plasmas
    C. Scharwitz, M. Böke, and J. Winter
    Plasma Process. Polym. 6, (2009) 76 – 85
  • Practical implementation of a two-hemisphere plasma absorption probe
    C. Scharwitz, M. Böke, J. Winter, M. Lapke, T. Mussenbrock, and R. P. Brinkmann
    Appl. Phys. Lett. 94, (2009) 011502
  • Characterization of single diamond-like and polymer-like nanoparticles by mid infrared nanospectroscopy
    J.-S. Samson, R. Meißner, E. Bründermann, M. Böke, J. Winter, and M. Havenith
    J. Appl. Phys. 105, (2009) 064908
  • The role of C2H4 for the acetylene chemistry in particle forming Ar/He/C2H2 plasma studied via quantitative mass spectrometry
    A. Consoli, J. Benedikt, A. von Keudell
    Plasma Sources Science and Technology 18, 34004 (2009)
  • Removal of model proteins using beams of argon ions and of oxygen atoms and molecules: mimicking the action of low-pressure Ar/O2 ICP discharges
    O. Kylián, J. Benedikt, L. Sirghi, R. Reuter, H. Rauscher, A. von Keudell and F. Rossi
    Plasma Processes and Polymers 6, 255 (2009)
  • Thin film growth from a low pressure plasma excited in a supersonic expanding gas jet
    C. Wachtendorf, C. Herweg, M. Daeuber, J. Benedikt, A. von Keudell
    78 J. Phys. D 42, 95205 (2009)
  • Molecular beam sampling system with very high beam-to-background ratio: the rotating skimmer concept
    J. Benedikt, D. Ellerweg, A. von Keudell
    Review of Scientific Instruments 80, 55107 (2009)
  • Deposition of silicon dioxide using an atmospheric microplasma jet
    V. Raballand, J. Benedikt, M. Zimmermann, A. von Keudell
    J. Appl. Phys. 105, 83304 (2009)
  • Development of an in-situ ellipsometer for the use at the first wall of a tokamak
    T. Dittmar, A. von Keudell, A. Kreter
    Nuclear Fusion 49, 045004 (2009)

2008

  • Etching of Bacillus atrophaeus by oxygen atoms, molecules and argon ions
    J. Benedikt, C. Flötgen, G. Kussel, V. Raballand, A. von Keudell
    J. Phys. Conference Series 133, 012012 (2008)
  • Initial polymerization reactions in particle forming Ar/He/C2H2 plasmas studied via quantitative mass spectrometry
    A. Consoli, J. Benedikt, A. von Keudell
    J. Phys. Chem. A 112, 11319 (2008)
  • Inactivation of Bacillus Atrophaeus and of Aspergillus Niger using beams of argon ions, of oxygen molecules and of oxygen atoms
    V. Raballand, J. Benedikt, J. Wunderlich, A. von Keudell
    J. Phys. D 41, 115207 (2008)
  • Anomalous roughness scaling of well-ordered amorphous fuorocarbon films deposited from a dusty octafluorocyclobutane plasma
    T. Baloniak, A. von Keudell
    Plasma Processes and Polymers 5, 653 (2008)
  • Deposition of carbon free silicon dioxide from pure hexamethyldisiloxane using an atmospheric microplasma jet
    V. Raballand, J. Benedikt, A. von Keudell
    Appl. Phys. Lett. 92, 91502, (2008)
  • Spatial dynamics of the light emission from a microplasma array
    J. Waskoenig, D. O'Connell, V. Schulz-von der Gathen, J. Winter, S.J. Park, and J.G. Eden,
    Appl. Phys. Lett. 92, (2008) 101503
  • Absolute atomic oxygen density profiles in the discharge core of a micro scale atmospheric pressure plasma jet
    Nikolas Knake, Kari Niemi, Stephan Reuter, Volker Schulz-von der Gathen, and Jörg Winter
    Appl. Phys. Lett. 93, (2008) 131503

2007

  • Modeling and simulation of the plasma absorption probe
    M. Lapke, T. Mussenbrock, and R. P. Brinkmann, C. Scharwitz, M. Böke, and J. Winter
    Appl. Phys. Lett. 90, (2007) 121502
  • Experimental characterization of the plasma absorption probe
    C. Scharwitz, M. Böke, S. Hong, and J. Winter
    Plasma Process. Polym. 4, (2007) 605-611
  • Thin film deposition by means of atmospheric pressure microplasmas
    J. Benedikt, V. Raballand A. Yanguas-Gil, K. Focke, A. von Keudell
    Plasma Physics and Controlled Fusion 49, 419 (2007)
  • Time resolved molecular beam mass spectrometry of the initial stage of particle formation in an Ar/He/C2H2 plasma
    J. Benedikt, A. Consoli, M. Schulze, A. von Keudell
    J. Phys. Chem. A 111, 10453 (2007)
  • Rotation of a Nanoparticle Cloud in an Inductively Coupled Plasma induced by weak static magnetic fields
    M. Schulze, D. O’Connell, T. Gans, A. von Keudell, P. Awakowicz
    Plasma Sources Science and Technology 16, 774 (2007)
  • A robust method to calculate metastable and resonant state densities from emission spectra in argon plasmas
    M. Schulze, A. Yanguas-Gil, A. von Keudell, P. Awakowicz
    J. Phys. D 41, 65206 (2007)
  • Heating of a dual frequency capacitively coupled plasma via the plasma series resonance
    E. Semmler, P. Awakowicz, A. von Keudell
    Plasma Sources Science and Technology 16, 839 (2007)
  • The role of Chemical Sputtering during plasma sterilization of bacillus atrophaeus
    J. Opretzka, J. Benedikt, P. Awakowicz, J. Wunderlich, A. von Keudell
    J. Physics D 40, 2826 (2007)
  • Optical and Electrical Characterization of a microplasma jet operated at atmospheric pressure
    A. Yanguas-Gil, K. Focke, J. Benedikt, A. von Keudell
    J. Appl. Phys. 101, 103307 (2007)
  • The search for growth precursors in reactive plasmas: from nanoparticles to microplasmas
    A. von Keudell, I. Kim, A. Consoli, M. Schulze, A. Yanguas-Gil, J. Benedikt
    Plasma Sources Sci. Technol. 16, S94 (2007)

2006

  • The European summer school 'Low temperature plasma physics: Basics and Applications' and ' master class: Biotechnical and medical applications
    M. Böke, and J. Winter
    Editorial, Plasma Sources Sci Technol. 15, (2006) 4
  • Terahertz time-domain spectroscopy as a new tool for the characterisation of dusty plasmas
    S. Ebbinghaus, K. Schröck, M. Heyden, E. Bründermann, G. Schwaab, M. Havenith, J.C. Schauer, M. Böke, J. Winter, and M. Tani
    Plasma Sources Sci. Technol. 15 (2006) 72
  • Atmospheric microplasma jet source as depositing tool
    J. Benedikt, K. Focke, A. Yanguas-Gil, A- von Keudell
    Appl. Phys. Lett. 89, 251504 (2006)
  • Roughness evolution during growth of a-C:H films in methane plasmas
    I. Kim, S. Hong, A. Consoli, J. Benedikt, A. von Keudell
    J. Appl. Phys. 100, 53302 (2006)
  • Controlled Particle Formation in an inductively coupled Plasma
    M. Schulze, A. von Keudell, P. Awakowicz
    Appl. Phys. Lett. 88, 141503 (2006)
  • Characterization of a rotating nanoparticles cloud in inductively coupled plasma
    M. Schulze, A. von Keudell, P. Awakowicz
    Plasma Sources Science and Technol. 15, 556 (2006)
  • Modelling of pulsed low-pressure plasmas and comparison with measurements in inductive discharges
    G. Wenig, M. Schulze, P. Awakowicz, A. von Keudell
    Plasma Sources Sci. and Technol. 15, S35 (2006)

2005

  • Wettabilities of plasma deposited polymer films
    K. Kutasi, N. Bibinov, A. von Keudell, K. Wiesemann
    J. Optoelectronics and Advanced Materials 7, 2549 (2005)
  • Growth precursor in a pulsed inductively coupled methane plasma
    M. Bauer, T. Schwarz-Selinger, W. Jacob, A. von Keudell
    J. Appl. Phys. 98, 073302 (2005)
  • Plasma chemistry of a pulsed inductively coupled methane plasma
    M. Bauer, T. Schwarz-Selinger H. Kang, A. von Keudell
    Plasma Sources Sci. Technol. 14, 543 (2005)
  • Ion-induced surface activation and hydrogen release during plasma-assisted hydrocarbon film growth
    C. Hopf, W. Jacob, A. von Keudell
    J. Appl. Phys. 97, 94904 (2005)

2004

  • Elementary processes in plasma-surface interaction:H-atom and ion-induced chemisorption of methyl on hydrocarbon filmsurfaces (review)
    A. von Keudell, W. Jacob
    Progress in Surface Science 26, 21-54 (2004)
  • Particle induced oscillations in inductively coupled plasmas
    A. von Keudell, M. Bauer
    Plasma Sources Sci. Technol. 13, 1 (2004)

2003

  • Particle beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching
    W. Jacob, C. Hopf, A. von Keudell, M. Meier, T. Schwarz-Selinger
    Rev. Sci. Instr. 74, 5123 (2003)
  • Direct verification of the ion-neutral synergism during hydrocarbon film growth
    C. Hopf, A. von Keudell, W. Jacob
    J. Appl. Phys. 93, 3352 (2003)
  • The influence of hydrogen ion bombardment on plasma-assisted hydrocarbon film growth
    C. Hopf, A. von Keudell, W. Jacob
    Diamond and Related Materials 12, 85 (2003)
  • Consequences of the Temperature and flux dependent sticking coeffcient of CH3 for nuclear fusion
    M. Meier, A. von Keudell, W. Jacob
    Nucl. Fusion 43, 25 (2003)
  • Chemical Sputtering of C:H films
    C. Hopf, A. von Keudell, W. Jacob
    J. Appl. Phys. 94, 2373 (2003)
  • Characterization of deposited hydrocarbon layers below the divertor and in the pumping ducts of ASDEX Upgrade
    M. Mayer, V. Rohde, A. von Keudell, and the ASDEX Upgrade team
    J. Nucl. Mater. 313-316, 429 (2003)
  • Can plasma experiments unravel microscopic surface processes in thin film growth and erosion ? – Implications of particle-beam experiments on the unde
    T. Schwarz-Selinger, M. Meier, C. Hopf, A. von Keudell, and W. Jacob
    Vacuum 71, 361 (2003)

2002

  • Chemical Sputtering of C:H films by low energy argon ion and H atom impact
    C. Hopf, A. von Keudell, W. Jacob
    Nuclear Fusion 42, L27 (2002)
  • Growth Mechanisms of amorphous hydrogenated carbon
    A. von Keudell, M. Meier, C. Hopf
    Diamond and Related Materials 11, 969 (2002)
  • Temperature dependence of the methyl sticking coefficient on hydrocarbon film surfaces
    M. Meier, A. von Keudell
    J. Chem. Phys. 116, 5125 ( 2002)
  • Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen (invited review)
    A. von Keudell
    Thin Solid Films 402, 1 (2002)

2001

  • Hydrogen elimination as a key step for the formation of polymer-like hydrocarbon films
    M. Meier, A. von Keudell
    J. Appl. Phys. 90, 3585 (2001)
  • Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films, as investigated with optical in situ diagnos
    A. von Keudell, M. Meier, T. Schwarz-Selinger
    Appl. Phys. A72, 551 (2001)
  • Surface reactions of hydrocarbon radicals: suppression of the re-deposition in fusion experiments via a divertor liner
    A. von Keudell, T. Schwarz-Selinger, W. Jacob, A. Stevens
    J. Nucl. Mater. 290-293, 231 (2001)
  • Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films
    A. von Keudell, T. Schwarz-Selinger, W. Jacob
    J. Appl. Phys. 89, 2979 (2001)
  • Quantification of a radical beam source for methyl radicals
    T. Schwarz-Selinger, V. Dose, W. Jacob, A. von Keudell
    J. Vac. Sci. Technol. A 19, 101 (2001)

2000

  • Infrared Analysis of thin films: amorphous, hydrogenated carbon on silicon
    W. Jacob, A. von Keudell, T. Schwarz-Selinger
    Brazilian Journal of Physics 30, 508 (2000)
  • Thermal conductivity of amorphous carbon thin films
    A. J. Bullen, K. E. O'Hara, D. G. Cahill, O. Monteiro, A. von Keudell
    J. Appl. Phys. 88, 6317 (2000)
  • Surface processes during thin film growth, Tutorial for the ERASMUS Summer School on low temperature plasma physics
    A. von Keudell
    Plasma Sources Science and Technology 9, 455-467 (2000)
  • A novel method for the absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen
    T. Schwarz-Selinger, A. von Keudell, W. Jacob
    J. Vac. Sci. Technol. A 18, 995 (2000)
  • Direct identification of the synergism between methyl radicals and atomic hydrogen during growth of amorphous hydrogenated carbon films
    A. von Keudell , T. Schwarz-Selinger, M. Meier, W. Jacob
    Appl. Phys. Letters. 76(6):676-678, (2000) corrigendum, Appl. Phys. Lett. 77, 459 (2000)
  • Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces
    C. Hopf, T. Schwarz-Selinger, W. Jacob, A. von Keudell
    J. of Appl. Physics. 87(6):2719-2725, (2000)

1999

  • Modulation Instabilities of Surface-Wave Sustained Discharges
    M. Böke, D. Grozev, G. Himmel, K. Kirov, H. Schlüter and A. Shivarova
    Advanced Technologies based on Wave and Beam generated Plasmas, ed. by H. Schlüter and A. Shivarova , NATO Science Series vol. 67 (1999) 505, ISBN 0-
  • Axial variation of line emission from surface wave sustained discharges
    M. Böke, G. Himmel, I. Koleva, and M. Schlüter
    J. Phys. D: Appl. Phys. 32, (1999) 2426-2432
  • Surface loss probabilities of hydrocarbon radicals on amorphous hydrogenated carbon film surfaces: consequences for the formation of re-deposited laye
    A. von Keudell, C. Hopf, T. Schwarz-Selinger, W. Jacob
    Nuclear Fusion. 39(10):1451-1462, (1999)
  • Surface loss probabilities of the dominant neutral precursors for film growth in methane and acetylene discharges
    C. Hopf, K. Letourneur, W. Jacob, T. Schwarz-Selinger, A. von Keudell
    Appl. Phys. Lett. 74, 3800 (1999)
  • Plasma chemical vapor deposition of hydrocarbon films: the influence of hydrocarbon source gas on the film properties
    T. Schwarz-Selinger, A. von Keudell, W. Jacob
    J. Appl. Phys. 86, 3988 (1999)
  • Erosion of Thin Hydrogenated Carbon Films in Oxygen, Oxygen/Hydrogen and Water Plasmas
    B. Landkammer, A. von Keudell, W. Jacob
    J. Nucl. Mater. 264, 48 (1999)
  • Direct insertion of SiH3 radicals into strained Si-Si surface bonds during plasma deposition of hydrogenated amorphous silicon films
    A. von Keudell, J.R. Abelson
    Phys. Rev. B. 59, 5791 (1999)
  • Thermally induced changes in the hydrogen microstructure of a-Si:H, analyzed using in situ real time infrared spectroscopy
    A. von Keudell, J.R. Abelson
    Jpn. J. Appl . Phys. 38, 4002 (1999)

1998

  • Structure of plasma-deposited amorphous hydrogenated boron-carbon thin films
    A. Annen, M. Saß, R. Beckmann, A. von Keudell, W. Jacob
    Thin Solid Films 312, 147 (1998)
  • The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: reactio
    A. von Keudell, J.R. Abelson
    J. App. Phys. 84, 489 (1998)

1997

  • Evidence for atomic H insertion into strained Si-Si bonds in the amorphous hydrogenated silicon sub-surface from in situ infrared spectroscopy
    Achim von Keudell, J.R. Abelson
    Appl. Phys. Lett. 71, 3832 (1997)
  • Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in situ ellipsometry
    A. von Keudell, T. Schwarz-Selinger, W. Jacob
    Thin Solid Films 308-309, 195 (1997)
  • Multivariate analysis of noise corrupted PECVD data
    A. von Keudell, A. Annen, V. Dose
    Thin Solid Films 307, 65 (1997)
  • Surface reactions during plasma enhanced chemical vapor deposition of hydrocarbon films
    A. von Keudell
    Nucl. Instr. Mat. B125, 323 (1997)
  • The interaction of hydrogen plasmas with hydrocarbon films, investigated by infrared spectroscopy using an optical cavity substrate
    A. von Keudell, W. Jacob
    J. Vac. Sci. Technol. A15, 402 (1997)
  • Surface relaxation during plasma enhanced chemical vapor deposition of a-C:H films, investigated by in situ ellipsometry
    A. von Keudell, W. Jacob
    J. Appl. Phys. 81, 1531 (1997)